Author(s)

Senzhe Xie

Corresponding Author

Senzhe Xie

ABSTRACT

Metal micro/nano forming technology is broadly used in semiconductors, microelectronics, chips, MEMS, and other fields. Because the superplastic flow of metal materials requires an extremely high strain rate, it is still challenging to accurately and widely fabricate the high-quality micro/nano metal structures which are three-dimensional and complex. Laser shock micro/nano forming can trigger the superplastic flow of metal materials by laser-induced ultra-high pressure and conform to the geometric structure of micro/nano die with ultra-high strain rate, so as to realize the rapid formation of large and three-dimensional structure that is high-precision and complex. This paper focuses on the ultra-high strain mechanism of laser-induced material deformation and expounds on the laser-matter interaction. The forming methods of micro/nano structure metal surface prepared by laser shock and nanosecond structure surface covered in situ are described in detail. This paper also discusses the molding strategy of laser shock micro/nano forming and the prospects for its future development.

KEYWORDS

Micro/nano forming, Laser shock, Metals, Micro/nano structure, Plastic deformation