Author(s)

Yazhou Wang, Yang Zhao, Guoming Xia, Anping Qiu, Qin Shi, Risheng Liu, Dan Zhang, Jing Wang

Corresponding Author

Yazhou Wang

ABSTRACT

This paper presents a self-calibration method for a batch of MEMS gyroscopes based on virtual Coriolis force to obtain their scale factor and bandwidth. An electrostatic force is added in the detection axis of the silicon gyroscope to simulate the real Coriolis force to calibrate its scale factor and bandwidth. Thirteen microgyroscopes are tested to verify the feasibility of this method. Compared with traditional method, the proposed method can obtain the scale factor of a bath of gyroscopes with an error less than 0.8%. Besides, the test results show that the measured bandwidth is 354.3Hz by the virtual rate-table method with a maximum phase error of 3.39 deg, which are in close agreement with the simulation result 349.5Hz

KEYWORDS

Calibration, Micro Gyroscope, Virtual Coriolis Force, Virtual Rate-Table