Author(s)

Yaowu Xu ¹, Daisheng Xu ¹

Affiliation(s)

¹ School of Optoelectronics & Communication Engineering, Xiamen University of Technology, Xiamen, 361024, China

Corresponding Author

Daisheng Xu

ABSTRACT

Inductors play a crucial role in signal processing, current stabilization, and suppression of electromagnetic interference, making them essential components in integrated filtering circuits. However, traditional inductors suffer from limitations such as low frequency bandwidth, large size, and low power. Additionally, they are constrained by manufacturing barriers associated with magnetic materials. This paper utilizes the finite element simulation method to establish a model of an integrated square spiral inductor based on Micro-Electrode-Mechanical System (MEMS) technology. Through three-dimensional finite element simulation analysis, the spatial magnetic field and potential distribution of the square spiral inductor are intuitively demonstrated, and the resistance and inductance values of the simulation model are obtained.

KEYWORDS

MEMS, Inductor, Magnetic Flux Density, Inductance

CITE THIS PAPER

Yaowu Xu, Daisheng Xu, Finite Element Analysis of Square Spiral Inductors Based on MEMS Technology. Journal of Electrotechnology, Electrical Engineering and Management (2023) Vol. 6: 1-9. DOI: http://dx.doi.org/10.23977/jeeem.2023.060401.

REFERENCES

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