Author(s)

Lili Qin ¹, Maojin Dong ¹, Yudong Feng ¹, Yi Wang ¹

Affiliation(s)

¹ Lanzhou Institute of Physics, Lanzhou, China

Corresponding Author

Lili Qin

ABSTRACT

This paper uses plasma-enhanced chemical vapor deposition (PECVD) to successfully fabricate silicon oxide films on silicon dioxide substrates for supporting layers of uncooled infrared focal plane array microbridge structures. In this paper, the thickness, refractive index, growth rate, and other parameters of the films were measured using the XP-2 step meter and ellipsometer. At the same time, atomic force microscopy (AFM) was used to study the surface morphology of the films. The experimental results show that deposition temperature and ICP power are the main factors affecting the growth rate of thin films. Deposition temperature is a crucial factor affecting the surface morphology of thin films.

KEYWORDS

SiOxCyHz; growth rate; refractive index; surface morphology; ICPECVD

CITE THIS PAPER

Lili Qin, Maojin Dong, Yudong Feng, Yi Wang, Transparent SiOxCyHz Barrier Film Prepared by Roll to Roll PECVD. Journal of Materials, Processing and Design (2022) Vol. 6: 29-35. DOI: http://dx.doi.org/10.23977/jmpd.2022.060204.

REFERENCES

[1] Dong Maojin, Feng Yudong, Han Xianhu, et al. Properties of transparent siloxane (SiOxCyHz) barrier films prepared by PECVD method. Journal of Vacuum Science and Technology, vol.42, pp. 54-59,February 2022.
[2] Liu Xingsheng, Dong Lijun. Research progress of flexible transparent conductive films based on zinc oxide in solar cells. New Chemical Materials, vol.48, pp. 49-51, November 2020.
[3] Hu Junying, Jiang Minhua. Study on the effect of tubular PECVD process on the color uniformity of solar cell coating. Jiangxi Chemical Industry, vol. 36, pp. 49-56,June 2020.
[4] Li Yuxin, Hu Fei. Forming conductive mechanism and structural properties of AgNW/polyethylenedioxythiophene flexible transparent conductive film based on starch film. Polymer Materials Science and Engineering, vol.37, pp. 89-92,November 2021.
[5] Wu Xiaoli, Wang Yuehui, Li Jingze. Research progress of flexible transparent conductive films with silver nanowires. Electronic Components and Materials, vol.39, pp. 102-106,May 2020.
[6] Zhang Huan, Wang Fei, Chen Zhuyu, et al. Preparation and Characterization of Silver Nanowire Composite Flexible Transparent Electrode. Journal of Wuhan University of Technology, vol.43, pp. 66-74, March 2021.

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