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Study on the Microscopic Morphology and Tribological Properties of Composite Films Prepared by Magnetron Sputtering

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DOI: 10.23977/jmpd.2024.080207 | Downloads: 4 | Views: 198

Author(s)

ANNISAA PRASTIKA BAHDIE 1

Affiliation(s)

1 Department of Mechanical Engineering, College of Engineering, Yangzhou University, Yangzhou, Jiangsu, 225127, China

Corresponding Author

ANNISAA PRASTIKA BAHDIE

ABSTRACT

The purpose of this study is to discuss the micro-morphology and tribological properties of Cr2O3-TiO2 composite films. In this paper, Cr2O3-TiO2 composite films were prepared by magnetron sputtering technology, and the microstructure and tribological properties of the films were comprehensively characterized and tested by scanning electron microscope, atomic force microscope and friction and wear testing machine. The experimental results show that proper sputtering power can significantly improve the surface quality and wear resistance of the films. The films prepared at 200W sputtering power show the best microstructure and tribological properties. In addition, it is found that the composition of the thin film has an important influence on its properties, and the contents of Cr, Ti and O in the thin film can be optimized by adjusting sputtering parameters, thus improving its properties. The study reveals the relationship between the micro-morphology and tribological properties of Cr2O3-TiO2-2 composite films, and provides theoretical support for further optimizing the preparation process and improving its properties.

KEYWORDS

Cr2O3-TiO2-2 composite film; Magnetron sputtering; Micro-morphology; Tribological properties

CITE THIS PAPER

ANNISAA PRASTIKA BAHDIE, Study on the Microscopic Morphology and Tribological Properties of Composite Films Prepared by Magnetron Sputtering. Journal of Materials, Processing and Design (2024) Vol. 8: 64-68. DOI: http://dx.doi.org/10.23977/jmpd.2024.080207.

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