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  4. Vol 9, Issue 1, 2026

Study on Temperature Compensation Techniques for Silicon Piezoresistive Pressure Sensors under Rapid Temperature Variations

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DOI: 10.23977/jeeem.2026.090103 | Downloads: 2 | Views: 107

Author(s)

Xinshi Zhang 1, Lijun Yang 1, Songli Wang 2, Xiongkai Dang 1

Affiliation(s)

1 School of Mechanical and Electrical Engineering, Shaanxi University of Science and Technology, Xi'an, China
2 Xi'an Siwei Sensing Technology Co., Ltd, Xi'an, China

Corresponding Author

Xinshi Zhang

ABSTRACT

To address the issue of output jumps and reduced accuracy in silicon piezoresistive pressure sensors caused by the mismatch of thermal expansion coefficients among different structural components under rapid cooling conditions, this study investigates a temperature compensation algorithm tailored for such operating environments. Firstly, the influence mechanism of temperature on the output characteristics of the pressure sensor was analyzed, and calibration experiments were conducted within the sensor's operating range (10–60 °C). Subsequently, rapid cooling experiments were performed using calibration parameters obtained from different temperature trajectories, and the effects of various compensation methods on output accuracy were compared. The experimental results indicate that, compared with compensation methods based solely on either the heating or cooling calibration parameters, the proposed method, which combines calibration parameters from both heating and cooling trajectories, can effectively reduce output jumps and improve the stability and accuracy of the sensor under rapid temperature variations.

KEYWORDS

Silicon Piezoresistive Pressure Sensor, Temperature Compensation, Rapid Temperature Variation

CITE THIS PAPER

Xinshi Zhang, Lijun Yang, Songli Wang, Xiongkai Dang. Study on Temperature Compensation Techniques for Silicon Piezoresistive Pressure Sensors under Rapid Temperature Variations. Journal of Electrotechnology, Electrical Engineering and Management (2026). Vol. 9, No.1, 24-32. DOI: http://dx.doi.org/10.23977/jeeem.2026.090103.

REFERENCES

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[3] Meng, H., & Gong, J. (2024). Application and development prospects of pressure sensors in industrial automation. Product Reliability Report, (09), 57–58.
[4] Yang, Q., & Wang, T. (2023). Nonlinearity error correction method for diffused silicon piezoresistive pressure sensors. Journal of Harbin Engineering University, 44(03), 466–472.
[5] He, H., Xu, J., Zhou, Z., et al. (2021). Study on interpolation compensation method for temperature errors of piezoresistive pressure sensors. Journal of Electronic Measurement and Instrumentation, 35(12), 1–7.
[6] Hu, F., Wang, B., Yang, H., et al. (2021). Effects of different ambient temperatures on barometric pressure sensors. Meteorological, Hydrological and Oceanographic Instruments, 38(02), 38–40.
[7] Falk, S., & Shi, L. (2025). A review of pressure sensor accuracy. Sensor World, 31(05), 6–10.

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